توضیحات
Lamp ДРШ-350-1 short-arc, discharge, ultra-high pressure, ultraviolet, continuous, is intended for use as a point source of short-wave UV radiation in photolithographic equipment of microelectronics, in fluorescence microscopy, in microphotolithography .. Used in projection installations intended for alignment and modular exposure of semiconductor wafers in the production of LSI, VLSI and other electronic products. Main technical parameters. Power (nominal) 350W. Radiation power of radiation in the range of wavelengths 350-450nm (W) 46 Intensity of radiation in the range of wavelengths 350-450nm (mWstrd) 4500 The voltage across the lamp is 60V. Lamp current 6A. Interelectrode distance mm
Lamp characteristics | |
Plinth | special |
Voltage | 55-70V |
Power | 320-360 Wt |
Average service life | 500 h |
Length | 128 mm |
Flask diameter | 20 mm |
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